Judy, J W <br/><br/>
A linear piezoelectric stepper motor with submicrometer step size and centimeter travel range.  [electronic resource] 

 -  IEEE transactions on ultrasonics, ferroelectrics, and frequency control  1990 
 - 428-37 p.  digital 
<br/><br/> Publication Type: Journal Article 
<br/><br/><label>ISSN: </label>0885-3010 
<br/><br/><label>Standard No.: </label>10.1109/58.105249  doi