Chang, S H <br/><br/>
An ultra-precision XYtheta(Z) piezo-micropositioner. I. Design and analysis.  [electronic resource] 

 -  IEEE transactions on ultrasonics, ferroelectrics, and frequency control  1999 
 - 897-905 p.  digital 
<br/><br/> Publication Type: Journal Article 
<br/><br/><label>ISSN: </label>0885-3010 
<br/><br/><label>Standard No.: </label>10.1109/58.775656  doi