Bennett, J M <br/><br/>
Comparison of instruments for measuring step heights and surface profiles.  [electronic resource] 

 -  Applied optics  Nov 1985 
 - 3766 p.  digital 
<br/><br/> Publication Type: Journal Article 
<br/><br/><label>ISSN: </label>1559-128X 
<br/><br/><label>Standard No.: </label>10.1364/ao.24.003766  doi