Himmer, P A <br/><br/>
Micromachined silicon nitride deformable mirrors for focus control.  [electronic resource] 

 -  Optics letters  Aug 2001 
 - 1280-2 p.  digital 
<br/><br/> Publication Type: Journal Article 
<br/><br/><label>ISSN: </label>0146-9592 
<br/><br/><label>Standard No.: </label>10.1364/ol.26.001280  doi