Mogensen, K B <br/><br/>
Ultraviolet transparent silicon oxynitride waveguides for biochemical microsystems.  [electronic resource] 

 -  Optics letters  May 2001 
 - 716-8 p.  digital 
<br/><br/> Publication Type: Journal Article 
<br/><br/><label>ISSN: </label>0146-9592 
<br/><br/><label>Standard No.: </label>10.1364/ol.26.000716  doi