TY  - GEN
AU  - Salling,C T
AU  - Lagally,M G
TI  - Fabrication of atomic-scale structures on si(001) surfaces
SN  - 0036-8075
PY  - 2010///0702
N1  - Publication Type: Journal Article
UR  - https://doi.org/10.1126/science.265.5171.502
ER  -