TY - GEN AU - Chou,Ming-Shean AU - Chang,Ken-Lin TI - UV/ozone degradation of gaseous hexamethyldisilazane (HMDS) SN - 0045-6535 PY - 2007///1213 KW - Air Pollutants KW - chemistry KW - Air Pollution KW - prevention & control KW - Carcinogens, Environmental KW - Gases KW - Organosilicon Compounds KW - Ozone KW - Photochemistry KW - Ultraviolet Rays N1 - Publication Type: Journal Article; Research Support, Non-U.S. Gov't UR - https://doi.org/10.1016/j.chemosphere.2007.05.040 ER -