TY  - GEN
AU  - Szatmári,S
AU  - Janicskó,J
AU  - Bohus,J
TI  - Two-step preionization scheme for discharge pumped KrF excimer lasers
SN  - 0034-6748
PY  - 2007///0619
N1  - Publication Type: Journal Article; Research Support, Non-U.S. Gov't
UR  - https://doi.org/10.1063/1.2715879
ER  -