Szatmári, S <br/><br/>
Two-step preionization scheme for discharge pumped KrF excimer lasers.  [electronic resource] 

 -  The Review of scientific instruments  Mar 2007 
 - 036108 p.  digital 
<br/><br/> Publication Type: Journal Article; Research Support, Non-U.S. Gov't 
<br/><br/><label>ISSN: </label>0034-6748 
<br/><br/><label>Standard No.: </label>10.1063/1.2715879  doi