Mechanical and dielectric properties of pure-silica-zeolite low-k materials. [electronic resource]
- Angewandte Chemie (International ed. in English) Sep 2006
- 6329-32 p. digital
Publication Type: Journal Article; Research Support, Non-U.S. Gov't; Research Support, U.S. Gov't, Non-P.H.S.
1433-7851
10.1002/anie.200602036 doi
Crystallography, X-Ray Electric Capacitance Electronics Microscopy, Electron Silicon Dioxide--chemistry Zeolites--chemistry