TY  - GEN
AU  - Benedikt,J
AU  - Schram,D C
AU  - van de Sanden,M C M
TI  - Detailed TIMS study of Ar/C(2)H(2) expanding thermal plasma: identification of a-C:H film growth precursors
SN  - 1089-5639
PY  - 2007///0724
N1  - Publication Type: Journal Article
UR  - https://doi.org/10.1021/jp052623a
ER  -