Wu, Jean-Yee <br/><br/>
Effect of the working gas of the ion-assisted source on the optical and mechanical properties of SiO2 films deposited by dual ion beam sputtering with Si and SiO2 as the starting materials.  [electronic resource] 

 -  Applied optics  May 2006 
 - 3510-5 p.  digital 
<br/><br/> Publication Type: Journal Article 
<br/><br/><label>ISSN: </label>1559-128X 
<br/><br/><label>Standard No.: </label>10.1364/ao.45.003510  doi