TY - GEN AU - Chen,Sheng-Hui AU - Lee,Cheng-Chung AU - Kuo,Chien-Cheng TI - How the monitoring curve is affected by the thermal shift of a filter during deposition SN - 1559-128X PY - 2006///0522 N1 - Publication Type: Journal Article UR - https://doi.org/10.1364/ao.45.001338 ER -