TY  - GEN
AU  - Guerin,Samuel
AU  - Hayden,Brian E
TI  - Physical vapor deposition method for the high-throughput synthesis of solid-state material libraries
SN  - 1520-4766
PY  - 2006///0203
KW  - Combinatorial Chemistry Techniques
KW  - instrumentation
KW  - Hot Temperature
KW  - Inorganic Chemicals
KW  - chemical synthesis
KW  - Models, Chemical
KW  - Silicon
KW  - chemistry
KW  - Volatilization
N1  - Publication Type: Journal Article; Research Support, Non-U.S. Gov't
UR  - https://doi.org/10.1021/cc050117p
ER  -