Physical vapor deposition method for the high-throughput synthesis of solid-state material libraries. [electronic resource]
- Journal of combinatorial chemistry
- 66-73 p. digital
Publication Type: Journal Article; Research Support, Non-U.S. Gov't
1520-4766
10.1021/cc050117p doi
Combinatorial Chemistry Techniques--instrumentation Hot Temperature Inorganic Chemicals--chemical synthesis Models, Chemical Silicon--chemistry Volatilization