TY - GEN AU - Haaheim,Jason AU - Eby,Ray AU - Nelson,Mike AU - Fragala,Joe AU - Rosner,Bjoern AU - Zhang,Hua AU - Athas,Greg TI - Dip Pen Nanolithography (DPN): process and instrument performance with NanoInk's NSCRIPTOR system SN - 0304-3991 PY - 2005///0502 N1 - Publication Type: Journal Article UR - https://doi.org/10.1016/j.ultramic.2004.11.015 ER -