TY  - GEN
AU  - de Groot,Peter
AU  - de Lega,Xavier Colonna
TI  - Signal modeling for low-coherence height-scanning interference microscopy
SN  - 1559-128X
PY  - 2004///1012
N1  - Publication Type: Journal Article
UR  - https://doi.org/10.1364/ao.43.004821
ER  -