Utsumi, Y <br/><br/>
Synchrotron-radiation-induced formation of salt particles on an X-ray lithography mask.  [electronic resource] 

 -  Journal of synchrotron radiation  May 1998 
 - 1141-3 p.  digital 
<br/><br/> Publication Type: Journal Article 
<br/><br/><label>ISSN: </label>0909-0495 
<br/><br/><label>Standard No.: </label>10.1107/S0909049597017603  doi