TY  - GEN
AU  - Favia,P
AU  - Fracassi,F
AU  - d'Agostino,R
TI  - X-ray photoelectron spectroscopy of plasma-polymerized films from tetramethylsilane-containing feeds
SN  - 0920-5063
PY  - 1993///0121
KW  - Argon
KW  - Electron Probe Microanalysis
KW  - Oxygen
KW  - Polymers
KW  - Silanes
KW  - analysis
KW  - Siloxanes
KW  - Trimethylsilyl Compounds
N1  - Publication Type: Journal Article; Research Support, Non-U.S. Gov't
ER  -