TY  - GEN
AU  - Matsuura,Yuji
AU  - Akiyama,Daisuke
AU  - Miyagi,Mitsunobu
TI  - Beam homogenizer for hollow-fiber delivery system of excimer laser light
SN  - 1559-128X
PY  - 2003///0703
N1  - Publication Type: Journal Article
UR  - https://doi.org/10.1364/ao.42.003505
ER  -