TY  - GEN
AU  - Lyuksyutov,Sergei F
AU  - Vaia,Richard A
AU  - Paramonov,Pavel B
AU  - Juhl,Shane
AU  - Waterhouse,Lynn
AU  - Ralich,Robert M
AU  - Sigalov,Grigori
AU  - Sancaktar,Erol
TI  - Electrostatic nanolithography in polymers using atomic force microscopy
SN  - 1476-1122
PY  - 2003///0808
KW  - Microscopy, Atomic Force
KW  - Nanotechnology
KW  - Polymers
KW  - Tungsten
N1  - Publication Type: Journal Article; Research Support, U.S. Gov't, Non-P.H.S
UR  - https://doi.org/10.1038/nmat926
ER  -