TY  - GEN
AU  - Pi,X D
AU  - Burrows,C P
AU  - Coleman,P G
TI  - Fluorine in silicon: diffusion, trapping, and precipitation
SN  - 0031-9007
PY  - 2003///0606
N1  - Publication Type: Journal Article
UR  - https://doi.org/10.1103/PhysRevLett.90.155901
ER  -