Pi, X D <br/><br/>
Fluorine in silicon: diffusion, trapping, and precipitation.  [electronic resource] 

 -  Physical review letters  Apr 2003 
 - 155901 p.  digital 
<br/><br/> Publication Type: Journal Article 
<br/><br/><label>ISSN: </label>0031-9007 
<br/><br/><label>Standard No.: </label>10.1103/PhysRevLett.90.155901  doi