TY  - GEN
AU  - Baunack,S
AU  - Menzel,S
AU  - Pekarcíková,M
AU  - Schmidt,H
AU  - Albert,M
AU  - Wetzig,K
TI  - AES and SIMS investigation of diffusion barriers for copper metallization in power-SAW devices
SN  - 1618-2642
PY  - 2003///0724
N1  - Publication Type: Journal Article
UR  - https://doi.org/10.1007/s00216-002-1741-9
ER  -