TY  - GEN
AU  - Oppenheim,Irving J
AU  - Jain,Akash
AU  - Greve,David W
TI  - MEMS ultrasonic transducers for the testing of solids
SN  - 0885-3010
PY  - 2003///0616
KW  - Acoustic Stimulation
KW  - Cementation
KW  - methods
KW  - Electric Capacitance
KW  - Electrochemistry
KW  - instrumentation
KW  - Equipment Design
KW  - Equipment Failure Analysis
KW  - Materials Testing
KW  - Miniaturization
KW  - Models, Theoretical
KW  - Quality Control
KW  - Sensitivity and Specificity
KW  - Transducers
KW  - Ultrasonography
N1  - Publication Type: Journal Article; Research Support, Non-U.S. Gov't
UR  - https://doi.org/10.1109/tuffc.2003.1193624
ER  -