Oppenheim, Irving J <br/><br/>
MEMS ultrasonic transducers for the testing of solids.  [electronic resource] 

 -  IEEE transactions on ultrasonics, ferroelectrics, and frequency control  Mar 2003 
 - 305-11 p.  digital 
<br/><br/> Publication Type: Journal Article; Research Support, Non-U.S. Gov't 
<br/><br/><label>ISSN: </label>0885-3010 
<br/><br/><label>Standard No.: </label>10.1109/tuffc.2003.1193624  doi 
<br/><br/><label>Subjects--Topical Terms: </label><br/>Acoustic Stimulation<br/>Cementation--methods<br/>Electric Capacitance<br/>Electrochemistry--instrumentation<br/>Equipment Design<br/>Equipment Failure Analysis--instrumentation<br/>Materials Testing--instrumentation<br/>Miniaturization<br/>Models, Theoretical<br/>Quality Control<br/>Sensitivity and Specificity<br/>Transducers<br/>Ultrasonography--instrumentation