TY  - GEN
AU  - Hau-Riege,Stefan P
AU  - Stearns,Daniel G
TI  - Correction of figure errors on optical surfaces by laser-induced contraction of Mo/Si multilayers
SN  - 0146-9592
PY  - 2003///0424
N1  - Publication Type: Journal Article
UR  - https://doi.org/10.1364/ol.28.000456
ER  -