TY  - GEN
AU  - Alam,Muhammad A
AU  - Smith,R Kent
AU  - Weir,Bonnie E
AU  - Silverman,Paul J
TI  - Thin dielectric films: Uncorrelated breakdown of integrated circuits
SN  - 0028-0836
PY  - 2002///1227
N1  - Publication Type: Journal Article
UR  - https://doi.org/10.1038/420378a
ER  -