TY  - GEN
AU  - Liu,Feng
AU  - Huang,Minghuang
AU  - Rugheimer,P P
AU  - Savage,D E
AU  - Lagally,M G
TI  - Nanostressors and the nanomechanical response of a thin silicon film on an insulator
SN  - 0031-9007
PY  - 2002///1105
N1  - Publication Type: Journal Article
UR  - https://doi.org/10.1103/PhysRevLett.89.136101
ER  -