Chen, Hsuen-Li <br/><br/>
Fabry-perot-type antireflective coating for deep-ultraviolet binary photomask applications.  [electronic resource] 

 -  Applied optics  Jul 2002 
 - 3961-5 p.  digital 
<br/><br/> Publication Type: Journal Article 
<br/><br/><label>ISSN: </label>1559-128X 
<br/><br/><label>Standard No.: </label>10.1364/ao.41.003961  doi