Roucka, R <br/><br/>
Low-temperature epitaxial growth of the quaternary wide band gap semiconductor SiCAlN.  [electronic resource] 

 -  Physical review letters  May 2002 
 - 206102 p.  digital 
<br/><br/> Publication Type: Journal Article 
<br/><br/><label>ISSN: </label>0031-9007 
<br/><br/><label>Standard No.: </label>10.1103/PhysRevLett.88.206102  doi