Yamazaki, H <br/><br/>
Quantitative depth profiling of argon in tungsten films by secondary ion mass spectrometry.  [electronic resource] 

 -  Analytical sciences : the international journal of the Japan Society for Analytical Chemistry  Mar 2001 
 - 407-10 p.  digital 
<br/><br/> Publication Type: Journal Article 
<br/><br/><label>ISSN: </label>0910-6340 
<br/><br/><label>Standard No.: </label>10.2116/analsci.17.407  doi