TY - GEN AU - Chan,H B AU - Aksyuk,V A AU - Kleiman,R N AU - Bishop,D J AU - Capasso,F TI - Nonlinear micromechanical Casimir oscillator SN - 0031-9007 PY - 2002///0129 N1 - Publication Type: Journal Article UR - https://doi.org/10.1103/PhysRevLett.87.211801 ER -