High Resolution Measurements of Two-dimensional Dopant Diffusion in Silicon.  [electronic resource] 

 -  Microscopy and microanalysis : the official journal of Microscopy Society of America, Microbeam Analysis Society, Microscopical Society of Canada  May 2000 
 - 237-245 p.  digital 
<br/><br/> Publication Type: Journal Article 
<br/><br/><label>ISSN: </label>1435-8115