Control of TiN oxidation upon atomic layer deposition of oxides. [electronic resource]

By: Contributor(s): Producer: 20181115Description: 27975-27982 p. digitalISSN:
  • 1463-9084
Online resources: In: Physical chemistry chemical physics : PCCP vol. 20
Tags from this library: No tags from this library for this title. Log in to add tags.
Star ratings
    Average rating: 0.0 (0 votes)
No physical items for this record

Publication Type: Journal Article

There are no comments on this title.

to post a comment.