Gas-assisted electron-beam-induced nanopatterning of high-quality Si-based insulator. [electronic resource]

By: Contributor(s): Producer: 20141110Description: 155301 p. digitalISSN:
  • 1361-6528
Online resources: In: Nanotechnology vol. 25
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Publication Type: Journal Article; Research Support, Non-U.S. Gov't; Research Support, U.S. Gov't, Non-P.H.S.

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