Step-Height Measurement of Surface Functionalized Micromachined Microcantilever Using Scanning White Light Interferometry. [electronic resource]

By: Contributor(s): Publication details: International journal of advances in engineering and technology Jan 2012Description: 241-248 p. digitalISSN:
  • 2231-1963
 In: International journal of advances in engineering and technology vol. 2
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Publication Type: Journal Article

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