3D finite element analysis of electrostatic deflection of commercial and FIB-modified cantilevers for electric and Kelvin force microscopy: I. Triangular shaped cantilevers with symmetric pyramidal tips. [electronic resource]

By: Contributor(s): Producer: 20121002Description: 405501 p. digitalISSN:
  • 0957-4484
Online resources: In: Nanotechnology vol. 19
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Publication Type: Journal Article

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