Optimized piranha etching process for SU8-based MEMS and MOEMS construction. [electronic resource]

By: Contributor(s): Publication details: Journal of micromechanics and microengineering : structures, devices, and systems Nov 2010Description: 1-8 p. digitalISSN:
  • 0960-1317
Online resources: In: Journal of micromechanics and microengineering : structures, devices, and systems vol. 20
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Publication Type: Journal Article

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