Structural evolution of nanocrystalline silicon thin films synthesized in high-density, low-temperature reactive plasmas. [electronic resource]

By: Contributor(s): Producer: 20090706Description: 215606 p. digitalISSN:
  • 1361-6528
Subject(s): Online resources: In: Nanotechnology vol. 20
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Publication Type: Journal Article; Research Support, Non-U.S. Gov't

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