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An ultra-precision XYtheta(Z) piezo-micropositioner. I. Design and analysis. [electronic resource]

By:

Chang, S H

Contributor(s):

Producer: 20121002Description: 897-905 p. digitalISSN:

0885-3010

Online resources:

Available from publisher's website

In: IEEE transactions on ultrasonics, ferroelectrics, and frequency control vol. 46

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Publication Type: Journal Article

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