APA

Thompson L. E., Rice P. M., Delenia E., Lee V. Y., Brock P. J., Magbitang T. P., Dubois G., Volksen W., Miller R. D. & Kim H. (20070719). Imaging thin films of nanoporous low-k dielectrics: comparison between ultramicrotomy and focused ion beam preparations for transmission electron microscopy. : Microscopy and microanalysis : the official journal of Microscopy Society of America, Microbeam Analysis Society, Microscopical Society of Canada.

Chicago

Thompson Leslie E, Rice Philip M, Delenia Eugene, Lee Victor Y, Brock Phillip J, Magbitang Teddie P, Dubois Geraud, Volksen Willi, Miller Robert D and Kim Ho-Cheol. 20070719. Imaging thin films of nanoporous low-k dielectrics: comparison between ultramicrotomy and focused ion beam preparations for transmission electron microscopy. : Microscopy and microanalysis : the official journal of Microscopy Society of America, Microbeam Analysis Society, Microscopical Society of Canada.

Harvard

Thompson L. E., Rice P. M., Delenia E., Lee V. Y., Brock P. J., Magbitang T. P., Dubois G., Volksen W., Miller R. D. and Kim H. (20070719). Imaging thin films of nanoporous low-k dielectrics: comparison between ultramicrotomy and focused ion beam preparations for transmission electron microscopy. : Microscopy and microanalysis : the official journal of Microscopy Society of America, Microbeam Analysis Society, Microscopical Society of Canada.

MLA

Thompson Leslie E, Rice Philip M, Delenia Eugene, Lee Victor Y, Brock Phillip J, Magbitang Teddie P, Dubois Geraud, Volksen Willi, Miller Robert D and Kim Ho-Cheol. Imaging thin films of nanoporous low-k dielectrics: comparison between ultramicrotomy and focused ion beam preparations for transmission electron microscopy. : Microscopy and microanalysis : the official journal of Microscopy Society of America, Microbeam Analysis Society, Microscopical Society of Canada. 20070719.