Depth profiling with modified dc-Grimm and rf-Grimm-type glow discharges operated with high gas flow rates and coupled to a high-resolution mass spectrometer. [electronic resource]
Producer: 20051110Description: 1965-74 p. digitalISSN:- 1618-2642
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Publication Type: Comparative Study; Journal Article; Research Support, Non-U.S. Gov't
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