High Resolution Measurements of Two-dimensional Dopant Diffusion in Silicon. [electronic resource]

Publication details: Microscopy and microanalysis : the official journal of Microscopy Society of America, Microbeam Analysis Society, Microscopical Society of Canada May 2000Description: 237-245 p. digitalISSN:
  • 1435-8115
 In: Microscopy and microanalysis : the official journal of Microscopy Society of America, Microbeam Analysis Society, Microscopical Society of Canada vol. 6
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Publication Type: Journal Article

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