Radio Frequency Plasma-Enhanced Reactive Magnetron Sputtering Deposition of α-SiN (Record no. 30399173)

MARC details
000 -LEADER
fixed length control field 00822 a2200241 4500
005 - DATE AND TIME OF LATEST TRANSACTION
control field 20250518073514.0
008 - FIXED-LENGTH DATA ELEMENTS--GENERAL INFORMATION
fixed length control field ####s 0 0 eng d
022 ## - INTERNATIONAL STANDARD SERIAL NUMBER
International Standard Serial Number 2470-1343
024 7# - OTHER STANDARD IDENTIFIER
Standard number or code 10.1021/acsomega.9b02452
Source of number or code doi
040 ## - CATALOGING SOURCE
Original cataloging agency NLM
Language of cataloging eng
Transcribing agency NLM
100 1# - MAIN ENTRY--PERSONAL NAME
Personal name Wang, Yuancheng
245 00 - TITLE STATEMENT
Title Radio Frequency Plasma-Enhanced Reactive Magnetron Sputtering Deposition of α-SiN
Medium [electronic resource]
260 ## - PUBLICATION, DISTRIBUTION, ETC.
Name of publisher, distributor, etc. ACS omega
Date of publication, distribution, etc. Dec 2019
300 ## - PHYSICAL DESCRIPTION
Extent 20205-20211 p.
Other physical details digital
500 ## - GENERAL NOTE
General note Publication Type: Journal Article
700 1# - ADDED ENTRY--PERSONAL NAME
Personal name Qu, Hongwei
700 1# - ADDED ENTRY--PERSONAL NAME
Personal name Wang, Yufei
700 1# - ADDED ENTRY--PERSONAL NAME
Personal name Dong, Fengxin
700 1# - ADDED ENTRY--PERSONAL NAME
Personal name Chen, Zhonghao
700 1# - ADDED ENTRY--PERSONAL NAME
Personal name Zheng, Wanhua
773 0# - HOST ITEM ENTRY
Title ACS omega
Related parts vol. 4
-- no. 23
-- p. 20205-20211
856 40 - ELECTRONIC LOCATION AND ACCESS
Uniform Resource Identifier <a href="https://doi.org/10.1021/acsomega.9b02452">https://doi.org/10.1021/acsomega.9b02452</a>
Public note Available from publisher's website

No items available.