Single step fabrication of Silicon resistors on SOI substrate used as Thermistors. (Record no. 29416479)

MARC details
000 -LEADER
fixed length control field 00779 a2200217 4500
005 - DATE AND TIME OF LATEST TRANSACTION
control field 20250518024609.0
008 - FIXED-LENGTH DATA ELEMENTS--GENERAL INFORMATION
fixed length control field ####s 0 0 eng d
022 ## - INTERNATIONAL STANDARD SERIAL NUMBER
International Standard Serial Number 2045-2322
024 7# - OTHER STANDARD IDENTIFIER
Standard number or code 10.1038/s41598-019-38753-x
Source of number or code doi
040 ## - CATALOGING SOURCE
Original cataloging agency NLM
Language of cataloging eng
Transcribing agency NLM
100 1# - MAIN ENTRY--PERSONAL NAME
Personal name Rollo, Serena
245 00 - TITLE STATEMENT
Title Single step fabrication of Silicon resistors on SOI substrate used as Thermistors.
Medium [electronic resource]
260 ## - PUBLICATION, DISTRIBUTION, ETC.
Name of publisher, distributor, etc. Scientific reports
Date of publication, distribution, etc. Feb 2019
300 ## - PHYSICAL DESCRIPTION
Extent 2835 p.
Other physical details digital
500 ## - GENERAL NOTE
General note Publication Type: Journal Article
700 1# - ADDED ENTRY--PERSONAL NAME
Personal name Rani, Dipti
700 1# - ADDED ENTRY--PERSONAL NAME
Personal name Olthuis, Wouter
700 1# - ADDED ENTRY--PERSONAL NAME
Personal name Pascual García, César
773 0# - HOST ITEM ENTRY
Title Scientific reports
Related parts vol. 9
-- no. 1
-- p. 2835
856 40 - ELECTRONIC LOCATION AND ACCESS
Uniform Resource Identifier <a href="https://doi.org/10.1038/s41598-019-38753-x">https://doi.org/10.1038/s41598-019-38753-x</a>
Public note Available from publisher's website

No items available.