Modeling of Gate Stack Patterning for Advanced Technology Nodes: A Review. (Record no. 29115005)

MARC details
000 -LEADER
fixed length control field 00686 a2200193 4500
005 - DATE AND TIME OF LATEST TRANSACTION
control field 20250518011944.0
008 - FIXED-LENGTH DATA ELEMENTS--GENERAL INFORMATION
fixed length control field ####s 0 0 eng d
022 ## - INTERNATIONAL STANDARD SERIAL NUMBER
International Standard Serial Number 2072-666X
024 7# - OTHER STANDARD IDENTIFIER
Standard number or code 10.3390/mi9120631
Source of number or code doi
040 ## - CATALOGING SOURCE
Original cataloging agency NLM
Language of cataloging eng
Transcribing agency NLM
100 1# - MAIN ENTRY--PERSONAL NAME
Personal name Klemenschits, Xaver
245 00 - TITLE STATEMENT
Title Modeling of Gate Stack Patterning for Advanced Technology Nodes: A Review.
Medium [electronic resource]
260 ## - PUBLICATION, DISTRIBUTION, ETC.
Name of publisher, distributor, etc. Micromachines
Date of publication, distribution, etc. Nov 2018
500 ## - GENERAL NOTE
General note Publication Type: Journal Article; Review
700 1# - ADDED ENTRY--PERSONAL NAME
Personal name Selberherr, Siegfried
700 1# - ADDED ENTRY--PERSONAL NAME
Personal name Filipovic, Lado
773 0# - HOST ITEM ENTRY
Title Micromachines
Related parts vol. 9
-- no. 12
856 40 - ELECTRONIC LOCATION AND ACCESS
Uniform Resource Identifier <a href="https://doi.org/10.3390/mi9120631">https://doi.org/10.3390/mi9120631</a>
Public note Available from publisher's website

No items available.