Femtosecond laser pulses for fast 3-D surface profilometry of microelectronic step-structures. (Record no. 22906667)
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| 000 -LEADER | |
|---|---|
| fixed length control field | 00953 a2200277 4500 |
| 005 - DATE AND TIME OF LATEST TRANSACTION | |
| control field | 20250516160720.0 |
| 008 - FIXED-LENGTH DATA ELEMENTS--GENERAL INFORMATION | |
| fixed length control field | 201402s 0 0 eng d |
| 022 ## - INTERNATIONAL STANDARD SERIAL NUMBER | |
| International Standard Serial Number | 1094-4087 |
| 024 7# - OTHER STANDARD IDENTIFIER | |
| Standard number or code | 10.1364/OE.21.015323 |
| Source of number or code | doi |
| 040 ## - CATALOGING SOURCE | |
| Original cataloging agency | NLM |
| Language of cataloging | eng |
| Transcribing agency | NLM |
| 100 1# - MAIN ENTRY--PERSONAL NAME | |
| Personal name | Joo, Woo-Deok |
| 264 #0 - PRODUCTION, PUBLICATION, DISTRIBUTION, MANUFACTURE, AND COPYRIGHT NOTICE | |
| Date of production, publication, distribution, manufacture, or copyright notice | 20140226 |
| 245 00 - TITLE STATEMENT | |
| Title | Femtosecond laser pulses for fast 3-D surface profilometry of microelectronic step-structures. |
| Medium | [electronic resource] |
| 260 ## - PUBLICATION, DISTRIBUTION, ETC. | |
| Name of publisher, distributor, etc. | Optics express |
| Date of publication, distribution, etc. | Jul 2013 |
| 300 ## - PHYSICAL DESCRIPTION | |
| Extent | 15323-34 p. |
| Other physical details | digital |
| 500 ## - GENERAL NOTE | |
| General note | Publication Type: Journal Article; Research Support, Non-U.S. Gov't |
| 700 1# - ADDED ENTRY--PERSONAL NAME | |
| Personal name | Kim, Seungman |
| 700 1# - ADDED ENTRY--PERSONAL NAME | |
| Personal name | Park, Jiyong |
| 700 1# - ADDED ENTRY--PERSONAL NAME | |
| Personal name | Lee, Keunwoo |
| 700 1# - ADDED ENTRY--PERSONAL NAME | |
| Personal name | Lee, Joohyung |
| 700 1# - ADDED ENTRY--PERSONAL NAME | |
| Personal name | Kim, Seungchul |
| 700 1# - ADDED ENTRY--PERSONAL NAME | |
| Personal name | Kim, Young-Jin |
| 700 1# - ADDED ENTRY--PERSONAL NAME | |
| Personal name | Kim, Seung-Woo |
| 773 0# - HOST ITEM ENTRY | |
| Title | Optics express |
| Related parts | vol. 21 |
| -- | no. 13 |
| -- | p. 15323-34 |
| 856 40 - ELECTRONIC LOCATION AND ACCESS | |
| Uniform Resource Identifier | <a href="https://doi.org/10.1364/OE.21.015323">https://doi.org/10.1364/OE.21.015323</a> |
| Public note | Available from publisher's website |
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