Exploring the limits of N-type ultra-shallow junction formation. (Record no. 22793156)
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| 000 -LEADER | |
|---|---|
| fixed length control field | 01030 a2200301 4500 |
| 005 - DATE AND TIME OF LATEST TRANSACTION | |
| control field | 20250516152733.0 |
| 008 - FIXED-LENGTH DATA ELEMENTS--GENERAL INFORMATION | |
| fixed length control field | 201310s 0 0 eng d |
| 022 ## - INTERNATIONAL STANDARD SERIAL NUMBER | |
| International Standard Serial Number | 1936-086X |
| 024 7# - OTHER STANDARD IDENTIFIER | |
| Standard number or code | 10.1021/nn4016407 |
| Source of number or code | doi |
| 040 ## - CATALOGING SOURCE | |
| Original cataloging agency | NLM |
| Language of cataloging | eng |
| Transcribing agency | NLM |
| 100 1# - MAIN ENTRY--PERSONAL NAME | |
| Personal name | Polley, Craig M |
| 264 #0 - PRODUCTION, PUBLICATION, DISTRIBUTION, MANUFACTURE, AND COPYRIGHT NOTICE | |
| Date of production, publication, distribution, manufacture, or copyright notice | 20131023 |
| 245 00 - TITLE STATEMENT | |
| Title | Exploring the limits of N-type ultra-shallow junction formation. |
| Medium | [electronic resource] |
| 260 ## - PUBLICATION, DISTRIBUTION, ETC. | |
| Name of publisher, distributor, etc. | ACS nano |
| Date of publication, distribution, etc. | Jun 2013 |
| 300 ## - PHYSICAL DESCRIPTION | |
| Extent | 5499-505 p. |
| Other physical details | digital |
| 500 ## - GENERAL NOTE | |
| General note | Publication Type: Journal Article; Research Support, Non-U.S. Gov't; Research Support, U.S. Gov't, Non-P.H.S. |
| 700 1# - ADDED ENTRY--PERSONAL NAME | |
| Personal name | Clarke, Warrick R |
| 700 1# - ADDED ENTRY--PERSONAL NAME | |
| Personal name | Miwa, Jill A |
| 700 1# - ADDED ENTRY--PERSONAL NAME | |
| Personal name | Scappucci, Giordano |
| 700 1# - ADDED ENTRY--PERSONAL NAME | |
| Personal name | Wells, Justin W |
| 700 1# - ADDED ENTRY--PERSONAL NAME | |
| Personal name | Jaeger, David L |
| 700 1# - ADDED ENTRY--PERSONAL NAME | |
| Personal name | Bischof, Maia R |
| 700 1# - ADDED ENTRY--PERSONAL NAME | |
| Personal name | Reidy, Richard F |
| 700 1# - ADDED ENTRY--PERSONAL NAME | |
| Personal name | Gorman, Brian P |
| 700 1# - ADDED ENTRY--PERSONAL NAME | |
| Personal name | Simmons, Michelle |
| 773 0# - HOST ITEM ENTRY | |
| Title | ACS nano |
| Related parts | vol. 7 |
| -- | no. 6 |
| -- | p. 5499-505 |
| 856 40 - ELECTRONIC LOCATION AND ACCESS | |
| Uniform Resource Identifier | <a href="https://doi.org/10.1021/nn4016407">https://doi.org/10.1021/nn4016407</a> |
| Public note | Available from publisher's website |
No items available.