Advanced mask aligner lithography: new illumination system. (Record no. 20244767)
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| 000 -LEADER | |
|---|---|
| fixed length control field | 01037 a2200313 4500 |
| 005 - DATE AND TIME OF LATEST TRANSACTION | |
| control field | 20250516004711.0 |
| 008 - FIXED-LENGTH DATA ELEMENTS--GENERAL INFORMATION | |
| fixed length control field | 201102s 0 0 eng d |
| 022 ## - INTERNATIONAL STANDARD SERIAL NUMBER | |
| International Standard Serial Number | 1094-4087 |
| 024 7# - OTHER STANDARD IDENTIFIER | |
| Standard number or code | 10.1364/OE.18.020968 |
| Source of number or code | doi |
| 040 ## - CATALOGING SOURCE | |
| Original cataloging agency | NLM |
| Language of cataloging | eng |
| Transcribing agency | NLM |
| 100 1# - MAIN ENTRY--PERSONAL NAME | |
| Personal name | Voelkel, Reinhard |
| 264 #0 - PRODUCTION, PUBLICATION, DISTRIBUTION, MANUFACTURE, AND COPYRIGHT NOTICE | |
| Date of production, publication, distribution, manufacture, or copyright notice | 20110202 |
| 245 00 - TITLE STATEMENT | |
| Title | Advanced mask aligner lithography: new illumination system. |
| Medium | [electronic resource] |
| 260 ## - PUBLICATION, DISTRIBUTION, ETC. | |
| Name of publisher, distributor, etc. | Optics express |
| Date of publication, distribution, etc. | Sep 2010 |
| 300 ## - PHYSICAL DESCRIPTION | |
| Extent | 20968-78 p. |
| Other physical details | digital |
| 500 ## - GENERAL NOTE | |
| General note | Publication Type: Journal Article; Research Support, Non-U.S. Gov't |
| 700 1# - ADDED ENTRY--PERSONAL NAME | |
| Personal name | Vogler, Uwe |
| 700 1# - ADDED ENTRY--PERSONAL NAME | |
| Personal name | Bich, Andreas |
| 700 1# - ADDED ENTRY--PERSONAL NAME | |
| Personal name | Pernet, Pascal |
| 700 1# - ADDED ENTRY--PERSONAL NAME | |
| Personal name | Weible, Kenneth J |
| 700 1# - ADDED ENTRY--PERSONAL NAME | |
| Personal name | Hornung, Michael |
| 700 1# - ADDED ENTRY--PERSONAL NAME | |
| Personal name | Zoberbier, Ralph |
| 700 1# - ADDED ENTRY--PERSONAL NAME | |
| Personal name | Cullmann, Elmar |
| 700 1# - ADDED ENTRY--PERSONAL NAME | |
| Personal name | Stuerzebecher, Lorenz |
| 700 1# - ADDED ENTRY--PERSONAL NAME | |
| Personal name | Harzendorf, Torsten |
| 700 1# - ADDED ENTRY--PERSONAL NAME | |
| Personal name | Zeitner, Uwe D |
| 773 0# - HOST ITEM ENTRY | |
| Title | Optics express |
| Related parts | vol. 18 |
| -- | no. 20 |
| -- | p. 20968-78 |
| 856 40 - ELECTRONIC LOCATION AND ACCESS | |
| Uniform Resource Identifier | <a href="https://doi.org/10.1364/OE.18.020968">https://doi.org/10.1364/OE.18.020968</a> |
| Public note | Available from publisher's website |
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